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Image courtesy Dr.John Mamin, IBM Research Division
Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Grating description |
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Structure: |
the grating is formed on Si wafer top surface |
Pattern types: |
array of sharp tips |
Tip angle: |
50±10 degrees (on the very tip end) |
Tip curvature radius: |
≤10nm |
Period: |
3±0,05µm |
Diagonal period: |
2,12µm |
Chip size: |
5x5x0,5mm |
Effective area: |
central square 2x2mm |
Height, h: |
0,3-0,5µm |
